Zobrazeno 1 - 2
of 2
pro vyhledávání: '"M E Mokhtari"'
Autor:
Rainer Kokozinski, Michael Görtz, Alexander Stanitzki, Christian Walk, Tatjana Fedtschenko, Michael Kraft, M E Mokhtari, Alexander Utz, Norbert Haas
Publikováno v:
Journal of Sensors and Sensor Systems, Vol 6, Pp 285-301 (2017)
In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure sensors. A flexible interface allows connection of a wide range of types of sensing elements. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::51a6bd7eb8b581d97c3f10d3718ddfef
https://www.j-sens-sens-syst.net/6/285/2017/
https://www.j-sens-sens-syst.net/6/285/2017/
Publikováno v:
Journal of Micromechanics and Microengineering. 12:420-424
In this paper a piezoelectrically driven silicon membrane pump with passive dynamic valves is described. It is designed to pump gases and liquids and to be tolerant to gas bubbles. Reducing the dead volume within the pump, and thus increasing the com
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb21424d12dce407540b0ea24350aaf6
https://doi.org/10.1088/0960-1317/12/4/313
https://doi.org/10.1088/0960-1317/12/4/313
