Zobrazeno 1 - 10
of 156
pro vyhledávání: '"M, Makhviladze"'
Autor:
T. M. Makhviladze, M. E. Sarychev
Publikováno v:
Russian Microelectronics. 51:426-434
Autor:
T. M. Makhviladze, M. E. Sarychev
Publikováno v:
Russian Microelectronics. 50:339-346
A model of two-component electromigration in a solid-state conductor with a substitutional impurity (an alloy of a type of a substitutional solid solution) is developed. The previously proposed approach to describe this process, using the methods of
Autor:
M. E. Sarychev, T. M. Makhviladze
Publikováno v:
Russian Microelectronics. 49:423-430
In this paper, we develop the theoretical concepts that allow establishing a relationship between the HEM activation energy of the electromigration of the intrinsic ions of a conductive material along the boundary of its compound (interface) with ano
Autor:
M. E. Sarychev, T. M. Makhviladze
Publikováno v:
Russian Microelectronics. 48:373-380
A model that allows calculating the effective charge of native and impurity ions during electromigration at the tilt grain boundary of metal is proposed for the first time. It is considered in the model that the main factor resulting in the differenc
Publikováno v:
Physical Mesomechanics. 22:269-274
The paper proposes a nonequilibrium thermodynamic model of quasi-static crack growth at the interface of perfectly elastic materials which are either free of defects or contain nonequilibrium point defects like vacancies or interstitial/substitutiona
Autor:
M. E. Sarychev, T. M. Makhviladze
Publikováno v:
Russian Microelectronics. 47:344-353
A new model of the interaction of an active suspension with a copper surface during the process of the chemical-mechanical polishing (CMP) of the copper metallization is developed. The manner of the formation and growth of the passivation layer is en
Publikováno v:
Physical Mesomechanics. 21:275-282
A model has been developed to describe the influence of vacancy electromigration in the bulk of joined conducting materials under applied electric current on the shape stability of a flat interface between them. A system of equations is formulated an
Autor:
M. E. Sarychev, T. M. Makhviladze
Publikováno v:
Russian Microelectronics. 47:11-19
We justify and exactly formulate a method for simulating the effect of mechanical stresses induced in a system silicon matrix–oxygen precipitate (SiO2) on the rates of fundamental processes determining the kinetics of precipitation. The developed m
Publikováno v:
Russian Microelectronics. 45:270-277
For the kinetics of the chemical mechanical polishing (CMP) of wafers containing periodic metal–dielectric structures, a model is developed and theoretically investigated with the use of contact mechanics methods for the nonlinear pressure dependen
Publikováno v:
Letters on Materials. 6:98-101