Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Lyu, Baoguo"'
Publikováno v:
中国工程科学, Vol 25, Iss 1, Pp 79-87 (2023)
High-purity metal sputtering target is one of the key basic materials for integrated circuits. Self-dependence of the sputtering targets is vital for the high-quality development of the integrated circuit industry in China. This study analyzes the ap
Externí odkaz:
https://doaj.org/article/5ef7a222dfc94aacbb75db08e0f4ce69
Publikováno v:
Journal of Physics: Conference Series; 10/24/2023, Vol. 2639 Issue 1, p1-13, 13p