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pro vyhledávání: '"Lynne Svedberg"'
Autor:
David W. Gidley, Jim Connor, E. Todd Ryan, Todd Guenther, Lynne Svedberg, Melissa Freeman, Jianing Sun, Katie Yu, Jen-Jiang Lee
Publikováno v:
MRS Proceedings. 766
The compatibility of ALD and CVD metal deposition with mesoporous and microporous carbon-doped organosilicate glass (OSG) films was examined. Blanket film studies using TEM, TOF-SIMS, and positron lifetime spectroscopy demonstrate that ALD Wand TaN p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28ab0358e5aa80b81cee378684e8f5a7
https://doi.org/10.1557/proc-766-e10.8
https://doi.org/10.1557/proc-766-e10.8
