Understanding EUV-induced plasma and application to particle contamination control in EUV scanners

Autor: Selwyn Cats, Vadim Yevgenyevich Banine, Adam Lassise, Ferdi van de Wetering, Luuk Heijmans, Andrey Nikipelov, Vladimir Kvon, Andrei Mikhailovich Yakunin, Mark van de Kerkhof

Publikováno v: Extreme Ultraviolet (EUV) Lithography XI.

With the introduction of the NXE:3400B scanner, ASML has brought EUV to High-Volume Manufacturing (HVM). In this context, ASML is pursuing a dual-path approach towards zero reticle defectivity: EUVcompatible pellicle or zero particles towards reticle

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::35ca21f1365fba1deec3c0c2ede3aa3e
https://doi.org/10.1117/12.2551020

Streamer knotwilg branching : sudden transition in morphology of positive streamers in high-purity nitrogen

Autor: Ute Ebert, Lcj Luuk Heijmans, S Sander Nijdam, Ttj Clevis, van Em Eddie Veldhuizen

Publikováno v: Journal of Physics D: Applied Physics, 48(35), 355202-1/10. Institute of Physics

We describe a peculiar branching phenomenon in positive repetitive streamer discharges in high purity nitrogen. We name it knotwilg branching after the Dutch word for a pollard willow tree. In a knotwilg branching a thick streamer suddenly splits int

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9d1608d81b9a46afd3d5f521bc66fc21
https://research.tue.nl/en/publications/520bc59d-935d-4447-9d34-c97aa4062346

Positive streamers in air of varying density: experiments on the scaling of the excitation density

Autor: Colin Price, Yoav Yair, Ttj Clevis, D. Dubrovin, Ute Ebert, S Sander Nijdam, Lcj Luuk Heijmans

Publikováno v: Journal of Physics D: Applied Physics, 48(5), 055205-1/10. Institute of Physics
Journal of Physics D: Applied Physics, 48, 1-10

Streamers are rapidly extending ionized finger-like structures that dominate the initial breakdown of large gas volumes in the presence of a sufficiently strong electric field. Their macroscopic parameters are described by simple scaling relations, w

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b6d5df6c4186ccfa8a69965ac8557651
https://ir.cwi.nl/pub/23846

Dust on a surface in a plasma : a charge simulation

Autor: Lcj Luuk Heijmans, S Sander Nijdam

Publikováno v: Physics of Plasmas, 23(4):043703, 1-10. American Institute of Physics

An electrically isolated particle on a substrate surface will be electrically charged when a plasma is applied above it. We show that the magnitude of this charge is determined by a balance of the impeding ion and electron fluxes that are strongly in

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1f3ba066fc967596e2771d97fbcca638
https://research.tue.nl/nl/publications/a07105ce-f930-4478-817d-cc0e72387489

Streamers in air splitting into three branches

Autor: S Sander Nijdam, Ute Ebert, van Em Eddie Veldhuizen, Lcj Luuk Heijmans

Publikováno v: Europhysics Letters, 1-6
ISSUE=103;STARTPAGE=1;ENDPAGE=6;ISSN=0295-5075;TITLE=Europhysics Letters
EPL, 103(2), 25002-1/6. Institute of Physics

We investigate the branching of positive streamers in air and present the first systematic investigation of splitting into more than two branches. We study discharges in 100 mbar artificial air that is exposed to voltage pulses of 10 kV applied to a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::85353bf5bc8a7969d2d98c21b5167d3f