Zobrazeno 1 - 10
of 38
pro vyhledávání: '"Lutz Aschke"'
Autor:
Lutz Aschke
Publikováno v:
PhotonicsViews. 18:1-1
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aab200a6f6c0b2fb2262480ef57441ce
https://doi.org/10.1002/phvs.202170201
https://doi.org/10.1002/phvs.202170201
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc2d498b82453c005c79ffc9987b221e
https://doi.org/10.1117/12.2183966
https://doi.org/10.1117/12.2183966
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1d680bbd92465e5bf44c4d7a5832b130
https://doi.org/10.1117/12.2024928
https://doi.org/10.1117/12.2024928
Autor:
Alexei Krasnaberski, Mikhail Ivanenko, Lutz Aschke, Vitalij Lissotschenko, Wyacheslav Grimm, Lisa Kleinschmidt
Publikováno v:
SPIE Proceedings.
Ultra-narrow line-shaped laser focuses are required for different material surface applications. We review the development of line-shaping optics for green DPSS lasers and report exemplary on several systems providing different line geometries and us
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e3baa9d4fb09abbdc4cc580053ef48ee
https://doi.org/10.1117/12.2004092
https://doi.org/10.1117/12.2004092
Autor:
Ansgar Teipel, Lutz Aschke
Publikováno v:
SPIE Proceedings.
Enabling the next technology nodes with optical technologies means further reduced error budgets for optical systems and new optical approaches for higher precision and increased throughput. This contribution discusses important aspects and features
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d4561600371826905b4e35464655c46e
https://doi.org/10.1117/12.879640
https://doi.org/10.1117/12.879640
Autor:
Mikhail Ivanenko, A. Krasnaberski, Lutz Aschke, Alexei Mikhailov, Vitalij Lissotschenko, Waleri Imgrunt, Yu. V. Miklyaev
Publikováno v:
SPIE Proceedings.
Diffractive optical elements (DOE) play an important role for laser beam shaping in industry, for example in lithography or parallel laser material processing. Typically such applications require high damage threshold and low background illumination
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9caae36de39132748905692c4fd5153f
https://doi.org/10.1117/12.874642
https://doi.org/10.1117/12.874642
Autor:
Lutz Aschke, Mikhail Ivanenko, Vitalij Lissotschenko, Yuri V. Miklyaev, Alexei Mikhailov, A. Krasnaberski
Publikováno v:
SPIE Proceedings.
A new type of low-voltage planar electro-optical device for fast beam deflection is reported. It contains two EO modulators, both working as multimode waveguides. The geometry of the waveguides (ratio height to length) enables an efficient self-imagi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c88eb1e82cf4e8d51a23edca7ea26e3b
https://doi.org/10.1117/12.874629
https://doi.org/10.1117/12.874629
Publikováno v:
SPIE Proceedings.
Micro-lenses and micro-lens arrays are widely used for various applications. Monolithic arrays of cylindrical lenslets made of glass, semiconductors or crystals provide great advantages to laser applications, e.g. high efficiency, intensity stability
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c86c46a7ba8305e2ff5ac72ab36c7ff0
https://doi.org/10.1117/12.841772
https://doi.org/10.1117/12.841772
Autor:
Maxim V. Bolshakov, Waleri Imgrunt, Lutz Aschke, Victor A. Soifer, Vladimir S. Pavelyev, Yuri V. Miklyaev, Denis G. Kachalov, Vitaly Lissotschenko
Optical lithography with its 193nm technology is pushed to reach and shift its limits even further. There is strong demand on innovations in illumination part of exposure tools. Current illumination systems consisting of diffractive and refractive op
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f838611a82873ec36044bd5dea6b2808
http://dspace.susu.ru/handle/0001.74/20499
http://dspace.susu.ru/handle/0001.74/20499
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXIII.
LIMO's unique production technology based on computer-aided design enables the manufacture of high precision asphere single lenses and arrays, where every single lens can be individually shaped. These free form micro-optical cylindrical lens and lens
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f61928ead03c74c48bda685b1f0c423
https://doi.org/10.1117/12.814264
https://doi.org/10.1117/12.814264