5×5 2D AFM cantilever arrays a first step towards a Terabit storage device

Autor: Lutwyche, M. ^{a, *}, Andreoli, C. ^a, Binnig, G. ^a, Brugger, J. ^a, Drechsler, U. ^a, Häberle, W. ^a, Rohrer, H. ^a, Rothuizen, H. ^a, Vettiger, P. ^a, Yaralioglu, G. ^b, Quate, C. ^b

Publikováno v: In Sensors & Actuators: A. Physical 1999 73(1):89-94

Compact copper/epoxy-based electromagnetic scanner for scanning probe applications.

Autor: Rothuizen, H., Despont, M., Drechsler, U., Genolet, G., Haberle, W., Lutwyche, M., Stutz, R., Vettiger, P.

Publikováno v: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266); 2002, p582-585, 4p

Microfabrication and parallel operation of 5/spl times/5 2D AFM cantilever arrays for data storage and imaging.

Autor: Lutwyche, M., Andreoli, C., Binnig, G., Brugger, J., Drechsler, U., Haeberle, W., Rohrer, H., Rothuizen, H., Vettiger, P.

Publikováno v: Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176; 1998, p8-11, 4p

Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.

Fabrication of freestanding structures and proposed applications in tunneling sensors.

Autor: Moore, D. F., Lutwyche, M. I., Hoole, A. C. F.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 6, p2548-2551, 4p