Field emission cathode array with self-aligned gate electrode fabricated by silicon micromachining.

Autor: Barth, W., Debski, T., Shi, F., Hudek, P., Kostic, I., Rangelow, I. W., Biehl, S., Iwert, T., Grabiec, P., Studzinska, K., Mitura, S., Bekh, I. I., Lushkin4, A. E., Il'chenko, L. G., Il'chenko, V. V., Haindl, G.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p3544-3548, 5p