Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Lukas L. Janavicius"'
Autor:
Apratim Khandelwal, Nagendra Athreya, Michael Q. Tu, Lukas L. Janavicius, Zhendong Yang, Olgica Milenkovic, Jean-Pierre Leburton, Charles M. Schroeder, Xiuling Li
Publikováno v:
Microsystems & Nanoengineering, Vol 8, Iss 1, Pp 1-12 (2022)
Abstract On-chip manipulation of charged particles using electrophoresis or electroosmosis is widely used for many applications, including optofluidic sensing, bioanalysis and macromolecular data storage. We hereby demonstrate a technique for the cap
Externí odkaz:
https://doaj.org/article/9ca0c1c5f33740c1b5f3cf778b7c797d
Publikováno v:
Applied Physics Reviews. 10:029901
Publikováno v:
Applied Physics Reviews. 10:011409
Defying the isotropic nature of traditional chemical etch, metal-assisted chemical etching (MacEtch) has allowed spatially defined anisotropic etching by using patterned metal catalyst films to locally enhance the etch rate of various semiconductors.