Influence of the Process Conditions of a Polishing Rinse after CuCMP

Autor: Filippini, Andrea, Petitdidier, Sébastien, Trouiller, Chantal, Couvrat, Alexandre, Luche, Marie Christine, Sabouret, Eric

Publikováno v: Diffusion and Defect Data Part B: Solid State Phenomena; November 2007, Vol. 134 Issue: 1 p375-378, 4p