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pro vyhledávání: '"Luca Sinko"'
Autor:
Michael I. Current, Takuya Sakaguchi, Yoji Kawasaki, Viktor Samu, Anita Pongracz, Luca Sinko, Arpad Kerekes, Zsolt Durko
Publikováno v:
IEEE Journal of the Electron Devices Society, Vol 12, Pp 399-406 (2024)
This study uses photoluminescence (PL) and other carrier-recombination sensitive probes in combination with spreading resistance profiling (SRP), SIMS and IMSIL MC-calculations to monitor the ion range and damage levels in highly-channeled and random
Externí odkaz:
https://doaj.org/article/b5bbf6e15ee04f39adae11b654873533