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Autor:
Yang, Xuefeng, Zhang, Shuxia, Wang, Baoji, Cai, Xiaolin, Li, Xiaohua, Yu, Weiyang, Wang, Qin, Lu, snd Zhongliang
Limited by the cost and complexity, superresolution lithography is hard to achieve through the traditional interference lithography. We here developed the plasmonic interference lithography technique by using a hyperbolic metamaterials (HMMs) / photo
Externí odkaz:
http://arxiv.org/abs/2209.02383
