Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Low temperature nanofabrication approach"'
Autor:
Wang, Peng
This thesis proposes a novel atomic force microscopy (AFM) system based on silicon waveguide cantilever displacement sensor. The sensor consists of input and output silicon waveguide cantilevers facing each other and separated by a nano-gap. It detec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a4f2974864835233f6eb83e72852ef17