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pro vyhledávání: '"Low Tmperature"'
Autor:
Chuang, Ian
In this dissertation, silicon films deposited at Ultra-High Vacuum using Electron-beam Evaporation (UHVEE) are investigated to form polysilicon films at low thermal budget (≤ 500oC) for enabling Micro-Electro-Mechanical System (MEMS) integration on
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9e039e7a9e7b78019f7b6ee41101a439
Publikováno v:
鉄と鋼. 83(2):157-161
Direct conversion of low temperature waste heat source into electrical energy with thermoelements is an interesting and challenging problem. In this study, the thermocouple consisting of a junction between Fe and Fe-7~12mass%Al alloy has been devel