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The assistance of thin film deposition with low-energy ion bombardment influences their final properties significantly. Especially, the application of so-called hyperthermal ions (energy
Externí odkaz:
https://ul.qucosa.de/id/qucosa%3A84595
https://ul.qucosa.de/api/qucosa%3A84595/attachment/ATT-0/
https://ul.qucosa.de/api/qucosa%3A84595/attachment/ATT-0/