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Publikováno v:
2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS).
We demonstrate a new thin-film electrostatic actuator (RAFA) capable of generating bidirectional repulsive- and attractive-forces. The two-layer actuator controllably produces measured electrostatic pressures up to 156 Pa (38.9 mN, for 2.5 cm2 electr