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pro vyhledávání: '"Lopayev, D."'
Autor:
Gubarev, V., Lopayev, D., Zotovich, A., Blauw, M. A., Medvedev, V., Krainov, P., Astakhov, D., Zyryanov, S.
The dynamics of H atom recombination on materials of interest for a EUV lithographer was studied under a longterm low-pressure H2 plasma exposure. The similarity of the experimental plasma with the typical EUV-induced plasma over the multi-layer mirr
Externí odkaz:
http://arxiv.org/abs/2206.04391
