Pumping characteristics of metal films in a vacuum glass vessel: Experimental and theoretical issues.

Autor: Bonucci, Antonio, Giannantonio, Roberto, Carretti, Corrado, Longoni, Giorgo, Caterino, Anna Lisa, Urbano, Marco

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2004, Vol. 22 Issue 4, p1820-1827, 8p