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pro vyhledávání: '"Long E. Ma"'
Autor:
Wei Fang, Carol Boye, Jack Jau, Hong Xiao, John G. Gaudiello, Theodorus E. Standaert, Long E. Ma, Fei Wang, Yan Zhao, Jennifer Fullam, Xu Zhang, Derek Tomlinson
Publikováno v:
SPIE Proceedings.
In this paper, we tested a novel methodology of measuring critical dimension (CD) uniformity, or CDU, with electron beam (e-beam) hotspot inspection and measurement systems developed by Hermes Microvision, Inc. (HMI). The systems were used to take im
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f6f1e21473a15e999b4a2cd1ea9c024f
https://doi.org/10.1117/12.879910
https://doi.org/10.1117/12.879910
