Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Liuhaodong Feng"'
Publikováno v:
AIP Advances, Vol 12, Iss 1, Pp 015105-015105-7 (2022)
In this paper, we proposed a micro-getter unit with a square thin-film getter formed atop a thin-film heater for vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device. This innovation through an integrated module unit can be fabricated
Externí odkaz:
https://doaj.org/article/2d8c0724dc804756b3f1f7184227d389
Autor:
Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, Shinan Wang
Publikováno v:
Sensors, Vol 23, Iss 3, p 1276 (2023)
To achieve a wide range and high accuracy detection of the vacuum level, for example, in an encapsulated vacuum microcavity, a composite-type MEMS Pirani gauge has been designed and fabricated. The Pirani gauge consists of two gauges of different siz
Externí odkaz:
https://doaj.org/article/7d015528199c4c5bad2a7a0d862a7d05
Publikováno v:
Micromachines, Vol 13, Iss 12, p 2252 (2022)
A MEMS thin-film getter–heater unit has been previously proposed for the vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device, where the floating structure (FS) design is found to be obviously more power-efficient than the solid stru
Externí odkaz:
https://doaj.org/article/ef4fc9cb27d54b26934f8ff469fb4cb5
Autor:
Liuhaodong Feng, Shuwen Zeng, Yongquan Su, Lihao Wang, Yang Xu, Song Guo, Shuo Chen, Yucheng Ji, Xinlin Peng, Zhenyu Wu, Shinan Wang
Publikováno v:
Micromachines, Vol 14, Iss 1, p 102 (2022)
In order to obtain high-quality through-silicon via (TSV) arrays for high voltage applications, we optimized the fabrication processes of the Si holes, evaluated the dielectric layers, carried out hole filling by Cu plating, and detected the final st
Externí odkaz:
https://doaj.org/article/029d13a6d95f429fb718815dd4e6a156
Autor:
Song Guo, Liuhaodong Feng, Shuo Chen, Yucheng Ji, Xinlin Peng, Yang Xu, Yong Yin, Shinan Wang
Publikováno v:
Sensors, Vol 22, Iss 23, p 9275 (2022)
We have designed a hot-plate-type micro-Pirani vacuum gauge with a simple structure and compatibility with conventional semiconductor fabrication processes. In the Pirani gauge, we used a vanadium oxide (VOx) membrane as the thermosensitive component
Externí odkaz:
https://doaj.org/article/76f2e25f8dc1415bac7fc4c9f74ea4ea