Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Liu Bai-Yong"'
Publikováno v:
Review of Scientific Instruments. 68:3785-3789
A simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and speed is described. By integrating two couples of silicon spreading-resistance temperature (SRT) sensors in two perpendicular directions on the surface o
Publikováno v:
Vacuum. 42:1080-1081
Publikováno v:
Acta Physica Sinica. 40:154
The silicon dioxide film of thickness 150? with device quality has been nitrided thermally by conventional long time method and high temperature rapid method. For the films breakdown characteristics and endurance under high field were investigated. T
Publikováno v:
Vacuum. 42:1041
The electron trapping at high-field and detrapping in thin thermally nitrided silicon oxide (SiOxNy) films were studied in the present work. For lightly nitrided oxide, the effective electron trap concentration was found to increase rapidly with the
Publikováno v:
Acta Physica Sinica. 40:289
The microstructure and current transport behavior in the thermally nitrided silicon oxide (SiOxNy) thin films have been studied and a new model is proposed to explain the current transport behavior of the films. In particular, the model includes the
Publikováno v:
Acta Physica Sinica. 40:1855
The electron trapping at high-field and detrapping in thin thermally nitrided silicon oxide (SiOxNy) films are studied in the present work. It is observed that when the nitridation degree is the lighter, with the increasing of the nirridation time th
Publikováno v:
Acta Physica Sinica. 40:1846
This paper study the delay of destructive breakdown and its mechanism on SiO2 films by TCE treatment. The result show that the breakdown current capacity increase with increasing the TCE flow-rate, treatment time and temperature, and reducing the oxy
Publikováno v:
Acta Physica Sinica. 38:376
A new trap-assisted two-step tunneling model is proposed to explain the conduction enhancement characteristics and conduction mechanism in heavily-nitrided oxide films. A theoretical calculation is carried out to fit the theory to the experimental re
Publikováno v:
Acta Physica Sinica. 38:68
The breakdown characteristics of very thin nitrided silicon oxide film have teen exammed. The breakdown mechanism of this film and the factors affecting the breakdown characteristics have been explored. It has been found that the improvement of break