Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Linji Lv"'
Autor:
Caijiao Song, Qianqian Wang, Bin Shan, Xiaobing Wang, Xiangjun Xu, Haida Liu, Geer Teng, Linji Lv, Mengyu Bao
Publikováno v:
Optical Sensing and Detection VII.
Autor:
Haida Liu, Qianqian Wang, Zhengxin Xiang, Geer Teng, Yu Zhao, Ziyang Liu, Kai Wei, Fengtong Dai, Linji Lv, Kuo Zhao, Chenyi Yang
Publikováno v:
Optics Express. 30:38832
Nanophotonic devices, which consist of multiple cell structures of the same size, are easy to manufacture. To avoid the optical proximity effect in the ultraviolet lithography process, the cell structures must be maintained at a distance from one ano