Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Ling Soon Wong"'
Autor:
Haiying Fu, Yeow Kheng Lim, Alex See, Wei Lu, Fong Pin Fen, Liang Choo Hsia, Ling Soon Wong, Tae Jong Lee, J. Hander
Publikováno v:
2004 IEEE International Reliability Physics Symposium. Proceedings.
This paper will compare the reliability results of first-generation Carbon-doped low k dielectric film with a second-generation Carbon-doped film, developed to have a high mechanical strength (HMS) and improved toughness. The first-generation low k f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::709317898b4241117748f91f845d5c8c
https://doi.org/10.1109/relphy.2004.1315419
https://doi.org/10.1109/relphy.2004.1315419
Autor:
Shou-Mian Chen, Ji-Sheng Pan, Jianou Shi, P. D. Foo, Licheng M. Han, N. Balasubramanian, Ling Soon Wong
Publikováno v:
Journal of The Electrochemical Society. 148:F148
Carbon-doped SiO 2 low k thin films were prepared by radio frequency plasma-enhanced chemical vapor deposition at 400°C from polymerization of tetramethylsilane (4MS) and copolymerization of tetramethylsilane and silane (SiH 4 ) precursor, with nitr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0a24c94ac0b298930f53eb6d0d6ffcfa
https://doi.org/10.1149/1.1375797
https://doi.org/10.1149/1.1375797
Autor:
Wei Lu, Yeow Kheng Lim, See, A., Tae Jong Lee, Liang Choo Hsia, Hander, J., Haiying Fu, Ling Soon Wong, Fong Pin Fen
Publikováno v:
Proceedings of the 2004 IEEE International Reliability Physics Symposium; 2004, p621-622, 2p