SiC MOSFET Gate Oxide Quality Improvement Method in Furnace Thermal Oxidation with Lower Pressure Control

Autor: Im, Young Bin, Kim, In Kyu, Son, Seong Pil, Kang, Youngkwon, Kim, Chung Jung, Lee, Junhyoung, Lee, Jungho, Lim, Jesung, Jeong, Changbeom

Publikováno v: Diffusion and Defect Data Part A: Defect and Diffusion Forum; August 2024, Vol. 434 Issue: 1 p67-70, 4p