Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Lienhard Körner"'
Publikováno v:
SPIE Proceedings.
Shack-Hartmann wave front sensors (SHS) are an accurate and highly versatile tool for characterizing and adjusting high performance optical systems, especially in the DUV wavelength range. The conventional set-up uses a single path approach. An illum
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa17a59d631591a1045a2882d63e4844
https://doi.org/10.1117/12.797726
https://doi.org/10.1117/12.797726
Publikováno v:
SPIE Proceedings.
Aside from steppers also inspection systems in the semiconductor industry as well as in micro material processing require DUV imaging optics with very high optical requirements. A test and adjustments set-up based on the Shack-Hartmann wave front sen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb94dd8cf395452347d723343609adc3
https://doi.org/10.1117/12.712506
https://doi.org/10.1117/12.712506
Conference
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