Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Lieh Hsi Lo"'
Publikováno v:
Sensors and Actuators B: Chemical. 94:53-64
To eliminate the need of a separate reference electrode and facilitate the use of ion-sensitive field-effect transistor (ISFET), an all-solid-state reference electrode integrated with ISFET in one chip has been developed. A novel agarose-stabilized K
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e2340602053c79f28dcf68552d8f9e1f
https://doi.org/10.1016/s0925-4005(03)00326-5
https://doi.org/10.1016/s0925-4005(03)00326-5
Publikováno v:
Journal of the Chinese Institute of Engineers. 25:327-334
To eliminate the need for a separate reference electrode and facilitate the use of an ion‐sensitive field‐effect transistor (ISFET) in a measurement system, a planar Ti/Pd/Ag/AgCl quasi reference electrode integrated with ISFET in one chip has be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9bb41c3cf9bafbac4efc4b84c2bd6b0b
https://doi.org/10.1080/02533839.2002.9670707
https://doi.org/10.1080/02533839.2002.9670707
Autor:
Lieh-hsi Lo, 羅烈熹
93
A monolithic design and fabrication process is proposed and realized for the thermal buckling micro valve and the built-in flow channel mass flow sensor modules in the thesis. The manufacturing procedure for the mass flow sensing and control
A monolithic design and fabrication process is proposed and realized for the thermal buckling micro valve and the built-in flow channel mass flow sensor modules in the thesis. The manufacturing procedure for the mass flow sensing and control
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/12213065700938426611
Publikováno v:
Proceedings of IEEE Sensors.
In this study, we demonstrate a highly sensitive polyimide capacitive humidity sensor achieved by reactive ion etching microstructures in polyimide film and novel electrode designs. For sensors of 3 /spl mu/m polyimide film, the sensitivity is improv
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8d114a83fdce06e7329fe3d8a9c438d7
https://doi.org/10.1109/icsens.2002.1037147
https://doi.org/10.1109/icsens.2002.1037147
Publikováno v:
Proceedings of IEEE Sensors (9780780374546); 2002, p511-511, 1p
Autor:
Chen, Kuan-ming
This thesis presents the design of a scratch drive actuator (SDA) for Micro Motor Application. In accordance with the force needed to drive the mechanism, the relationship among SDA output force, geometries, and applied voltage is first constructed b
Autor:
Li, Yao-Yu
Polyimide thin films have been widely used in microelectronic and Micro-Electro-Mechanical System applications due to their many excellent characteristics including low dielectric constant, easy processing, good step coverage ability, high heat resis
Autor:
Lin, Chung-ying
This thesis presents a surface micromachining process to fabricate scratch drive actuator (SDA). Besides, various parameters (plate length, plate width, plate shapes, support beam width, spring type, one-plate SDA/four-plate SDA, dimple number, bushi
Autor:
Li, Ming-chan
¡@¡@¡@¡@¡@¡@¡@¡@¡@¡@¡@¡@¡@Abstract This paper presents an integrated batch-produced (Bi, Sb)2Te3 micro thermoelectric cooler(£g-TEC) fabricated by electrochemical MEMS technology. To optimize the thermal conductivity of (Bi, Sb)2Te3 thi
Autor:
Chang, Yi-Wen
By integrating Nanotechnology and MEMS technology, this thesis aims to research a flexural-plate wave (FPW) sensor for testing Immunoglobulin E (IgE) concentration in blood serum, a significant index for the diagnosis of allergies. The traditional me