Zobrazeno 1 - 10
of 116
pro vyhledávání: '"Liang Cheng Tu"'
Publikováno v:
Micromachines, Vol 7, Iss 9, p 167 (2016)
This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection syst
Externí odkaz:
https://doaj.org/article/806886f1ecea4282961cc5ce48e34549
Autor:
Yuan Wang, Xiaoxiao Song, Jingqian Xi, Fangzheng Li, Lei Xu, Huafeng Liu, Chen Wang, Shuangyang Kuang, Liang-Cheng Tu, Michael Kraft, Chun Zhao
Publikováno v:
Journal of Microelectromechanical Systems. 31:402-407
This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4428dda0492d41454023748bbf82ea6b
https://doi.org/10.1109/jmems.2022.3162015
https://doi.org/10.1109/jmems.2022.3162015
The measurements of gravity have been widely applied to earthquake monitoring, resource exploration and identification of natural voids. Traditional gravimeters, restricted by the exorbitant price and bulk, are hardly to be utilized in newly develope
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e63a742620b274731abf24cdbd28075
https://doi.org/10.5194/egusphere-egu23-3079
https://doi.org/10.5194/egusphere-egu23-3079
Publikováno v:
Journal of Lightwave Technology. 40:1195-1201
Simultaneously and independently measuring two-dimensional (2D) displacement, one-dimensional (1D) for out-of-plane measurement and 1D for in-plane measurement, is important for practical applications. Although extrinsic fiber Fabry-Perot interferome
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc23693039aad3ea6c69d7ad9be46a8d
https://doi.org/10.1109/jlt.2021.3126462
https://doi.org/10.1109/jlt.2021.3126462
Autor:
Liang-Cheng Tu, Chen Wang, Huafeng Liu, Chengxin Li, Xiaoxiao Song, Yuan Wang, Jingqian Xi, Fangzheng Li, Chun Zhao, Lu Gao, Michael Kraft
Publikováno v:
Journal of Microelectromechanical Systems. 30:958-967
Magnetometers are ubiquitous in applications covering many aspects of modern life, such as navigation, smart devices, biomedical systems, geological surveying and aerospace. This work reports a resonant Lorentz-force magnetometer featuring structural
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ee6618dd9829687e1f17b13c7d76ae6f
https://doi.org/10.1109/jmems.2021.3113769
https://doi.org/10.1109/jmems.2021.3113769
Autor:
Hua-Feng Liu, Zhi-Cai Luo, Zhong-Kun Hu, Shan-Qing Yang, Liang-Cheng Tu, Ze-Bing Zhou, Michael Kraft
ispartof: PETROLEUM SCIENCE vol:19 issue:6 pages:2631-2648 status: published
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c68209401f1094cc7060fcc97af84de2
https://lirias.kuleuven.be/handle/20.500.12942/716985
https://lirias.kuleuven.be/handle/20.500.12942/716985
Publikováno v:
Sensors, Vol 20, Iss 13, p 3652 (2020)
Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physi
Externí odkaz:
https://doaj.org/article/f9ba09b7c71841098e0f2d94f04fc292
Autor:
Qian Wang, Lujia Yang, Chun Zhao, Wang Qiu, Fangjing Hu, Ji'ao Tian, Xiaochao Xu, Yanyan Fang, Liang-Cheng Tu
Publikováno v:
IEEE Sensors Journal. 21:22480-22488
In this paper, the air buoyancy effect on Micro-Electro-MechanicalSystem (MEMS)-based gravity sensors for high-resolution gravity measurements is investigated. The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber;
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::36c6bd2271f7426258280d737f30447d
https://doi.org/10.1109/jsen.2021.3106667
https://doi.org/10.1109/jsen.2021.3106667
Autor:
Qiangwei Xu, Ji Fan, Dandan Liu, Huafeng Liu, Yuanlei Wang, Jinquan Liu, Liang-Cheng Tu, Wenjie Wu, Shitao Yan
Publikováno v:
IEEE Sensors Journal. 21:19872-19880
The reduction of temperature effect is vitally important for high precision sensors. This paper introduces the theoretical analysis and experimental verification of an in-situ compensation method on the temperature coefficient of the scale factor for
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65e409786b449b8221843793f51c1dfe
https://doi.org/10.1109/jsen.2021.3098797
https://doi.org/10.1109/jsen.2021.3098797
Autor:
Liang-Cheng Tu, Yuan Wang, Jingqian Xi, Huafeng Liu, Fangzheng Li, Chun Zhao, Lu Gao, Chengxin Li
Publikováno v:
Journal of Microelectromechanical Systems. 30:539-549
In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS thermometer, based on parametric modulation, is proposed. By periodically modulating the effective stiffness of a standard clamped-clamped beam (C-C beam), whi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::de9721da77ee3f073f84358597c24e0c
https://doi.org/10.1109/jmems.2021.3079442
https://doi.org/10.1109/jmems.2021.3079442