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pro vyhledávání: '"Lian Feng Ni"'
Publikováno v:
Key Engineering Materials. 625:326-331
The development of micro-nanomanufacturing technology leads to higher requirement for measurement technology, which gives birth to the ultra-precision measurement technology. As a kind of low coherence interferometry technology, spectral interferomet
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc58464aec9e78c868f999b0b391a7bc
https://doi.org/10.4028/www.scientific.net/kem.625.326
https://doi.org/10.4028/www.scientific.net/kem.625.326
