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Akademický článek

Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis

Autor: Chen Jie, Liu Jie, Wang Xingrui, Zhang Longfei, Deng Xiao, Cheng Xinbin, Li Tongbao

Publikováno v: Measurement Science Review, Vol 17, Iss 6, Pp 264-268 (2017)

Pitch uncertainty and line edge roughness are among the critical quality attributes of a pitch standard and normally the analyses of these two parameters are separate. The analysis of self-traceable Cr atom lithography nano-gratings shows a positive

Externí odkaz: https://doaj.org/article/70eabeedbd1b42e8aa6f45d715b66f18

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Nanometer displacement measurement based on metrological self-mixing grating interferometer traceable to the pitch standard of one-dimension chromium self-traceable grating

Autor: Gu, Zhenjie, Xie, Zhangning, Chang, Zhikun, Xiao, Guangxu, Yin, Zhijun, Lin, Zichao, Zhou, Tong, Lei, Lihua, Jin, Tao, Xue, Dongbai, Deng, Xiao, Chen, Xinbin, Li, Tongbao

Traceability of precision instrument and measuring method is the core issue in metrology science. In the field of nanometer length measurement, the laser interferometers are usually used to trace the measurement value to the laser wavelength, but the

Externí odkaz: http://arxiv.org/abs/2306.14146

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Chromium Self-Traceable Length Standard: Investigating Geometry and Diffraction for Length Traceability Chain

Autor: Lin, Zichao, Yao, Yulin, Xie, Zhangning, Xue, Dongbai, Zhou, Tong, Tang, Zhaohui, Lei, Lihua, Jin, Tao, Dun, Xiong, Deng, Xiao, Cheng, Xinbin, Li, Tongbao

Natural constant-based metrology methods offer an effective approach to achieving traceability in nanometric measurements. The Cr grating, fabricated by atom lithography and featuring a pitch of $d=212.7705\pm0.0049~{\rm nm}$ traceable to the Cr tran

Externí odkaz: http://arxiv.org/abs/2306.14083

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Length traceability chain based on chromium atom transition frequency

Autor: Deng, Xiao, Lin, Zichao, Dai, Gaoliang, Tang, Zhaohui, Xie, Zhangning, Xiao, Guangxu, Yin, Zhijun, Lei, Lihua, Jin, Tao, Xue, Dongbai, Gu, Zhenjie, Cheng, Xinbin, Li, Tongbao

Precise positioning measurement plays an important role in in today advanced manufacturing industry, and length traceability chain has been optimizing and enriching to fulfill the developing and various precise positioning requirement. In this paper,

Externí odkaz: http://arxiv.org/abs/2302.14633

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