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Autor:
Li, Jiahui Kevin
Publikováno v:
Electronic Theses and Dissertations
Microelectromechanical systems (MEMS) combine electrical components with mechanical systems on a micro scale. MEMS devices involve miniature micron-size mechanical moving structures manufactured using semiconductor-based fabrication. Deep reactive io
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______2870::01e5cd0debadc92ef1b399ed9b96126b
https://scholar.uwindsor.ca/etd/8961
https://scholar.uwindsor.ca/etd/8961