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Autor:
Lewis, Matthew Tyson
Publikováno v:
Master's Theses and Project Reports.
The bottom-up processing techniques used for making Microelectromechanical systems (MEMS) devices can produce material properties different from bulk processing. The material properties must be evaluated with the process parameters used and for chang
Externí odkaz:
https://digitalcommons.calpoly.edu/theses/395
https://digitalcommons.calpoly.edu/cgi/viewcontent.cgi?article=1419&context=theses
https://digitalcommons.calpoly.edu/cgi/viewcontent.cgi?article=1419&context=theses
