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pro vyhledávání: '"Lev V. Kovalchuk"'
Autor:
D A Goryachkin, Akira Endo, Lev V. Kovalchuk, Nikolay A. Romanov, Akira Sumitani, Krzysztof Nowak, Takashi Suganuma, V E Sherstobitov, Andrey Yu. Rodionov
Publikováno v:
High-Power Laser Ablation VII.
Recent studies of fundamental issues of target material format and laser radiation parameters 1,2 have revealed the attractiveness of LPP EUV source technolo gy based on Sn target and multi-kW CO 2 laser driver. In recent work 3 we have reported 8kW
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::53f4fdab86a377b26ff98e362617880a
https://doi.org/10.1117/12.782606
https://doi.org/10.1117/12.782606
