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pro vyhledávání: '"Lev Ryzhikov"'
Autor:
Lev Ryzhikov
Publikováno v:
Current Developments in Lens Design and Optical Engineering XXIII.
Autor:
Lev Ryzhikov
Publikováno v:
Current Developments in Lens Design and Optical Engineering XXIII.
Autor:
Lev Ryzhikov
Publikováno v:
Current Developments in Lens Design and Optical Engineering XXII.
Demand for High NA objective lenses with diffraction limited image quality is growing. This demand translates in design more complex optical system with many optical components. In order to optimize the most favorable arrangement of optical component
Autor:
Lev Ryzhikov, Yuli Vladimirsky
Publikováno v:
SPIE Proceedings.
This paper presents an approach to Laser Illumination System (LIS) efficiency optimization for High Numerical Aperture (NA) Microlithography exposure tools. These advanced tool are immersion systems with NA>1 utilizing many Reticle Enhancement Techni
Autor:
Romeo I. Mercado, Lev Ryzhikov
Publikováno v:
SPIE Proceedings.
This paper reviews the methods of selecting optical materials for designing apochromatic and superachromatic lenses. The application of these glass combinations to the design of photographic lenses and microscope objectives is reported.