Plasma chemistry of an expanding Ar/C 2H 2 plasma used for fast deposition of a-C:H

Autor: van de Sanden, M.C.M ^*, van Hest, M.F.A.M, de Graaf, A, Smets, A.H.M, Letourneur, K.G.Y, Boogaarts, M.G.H, Schram, D.C

Publikováno v: In Diamond & Related Materials 1999 8(2):677-681

Deposition of a-C:H thin films : material characteristics and plasma chemistry

Autor: Benedikt, J., Letourneur, K.G.Y., Schram, D.C., Sanden, van de, M.C.M., Stoffels, W.W.

Publikováno v: Frontiers in Low Temperature Plasma Diagnostics IV : Rodluc Conference Centre, the Netherlands, 25.03.2001-29.03.2001-Proceedings, 112-115
STARTPAGE=112;ENDPAGE=115;TITLE=Frontiers in Low Temperature Plasma Diagnostics IV : Rodluc Conference Centre, the Netherlands, 25.03.2001-29.03.2001-Proceedings

It is a known fact that a-C:H can be deposited at high rates by injecting acetylene (or other precursor gases) in an expanding thermal plasma created by means of a cascaded arc. Injected hydrocarbons are dissociated and react differently for various

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::9f0e0f575102e31b7fc143f4f498093b
https://research.tue.nl/nl/publications/672e5e38-2ce0-4227-adbb-54a9b30bc576

a-C:H deposition : plasma physics, chemistry and material properties

Autor: Benedikt, J., Letourneur, K.G.Y., Engeln, R.A.H., Witte, M., Schram, D.C., van de Sanden, M.C.M.

Publikováno v: CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes-Juan-les-Pins, France, 275-277
STARTPAGE=275;ENDPAGE=277;TITLE=CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes-Juan-les-Pins, France

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::49e382d2620691af3cde513146f3014c
https://research.tue.nl/nl/publications/54895cbc-7721-4874-bddd-15acde9a79b8

Polymerization in remote hydrocarbon deposition plasmas

Autor: Graaf, de, A., Hest, van, M.F.A.M., Sanden, van de, M.C.M., Letourneur, K.G.Y., Schram, D.C.

Publikováno v: AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::f5275a114964b80dd10be53bc5d8d328
https://research.tue.nl/nl/publications/6dbf9a6c-8451-4333-af5e-b319d31503ea

Infrared gasphase absorption spectroscopy on expanding Ar/CxHy plasmas

Autor: Graaf, de, A., Hest, van, M.F.A.M., Letourneur, K.G.Y., Sanden, van de, M.C.M., Schram, D.C.

Publikováno v: IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August-4 September, 1998 : abstract book

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::8e5d397b1fe72b9d5b468c90a5904daf
https://research.tue.nl/nl/publications/6c375113-4be1-4259-8971-dfc8402b504b