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pro vyhledávání: '"Lester Chiou"'
Autor:
Todd Henry, Mei-Ju Chen, T. Toh, Yu-Shan Chen, Steve Ji, Pin-Yuan Yu, Scott Wei, Chi-Ren Hung, Yiliang Lin, Alex Hsu, H. L. Sun, B. Colombeau, Wei-Ming Wang, Kyu-Ha Shim, Michael Hsiao, Chien-Hua Chu, Wei Zou, Li-Yuan Cheng, Lester Chiou, Jay Huang, B.N. Guo
Publikováno v:
11th International Workshop on Junction Technology (IWJT).
Co-implantation has been proven to be an effective method to reduce Transient Enhanced Diffusion (TED). In this paper, the effect of Carbon co-implant energy, dose, and combined with Fluorine implants were investigated to control TED for a contact Ph
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::29769df398702261d9221c83f6f93b49
https://doi.org/10.1109/iwjt.2011.5969989
https://doi.org/10.1109/iwjt.2011.5969989
