Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Leslie E. Carpenter"'
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 22:3497
While the primary use of hydrogen silsesquioxane (HSQ) is as a dielectric in microelectronics fabrication, this material is also capable of forming high resolution, negative-tone features with low roughness when patterned with an electron beam. Unfor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ccccde06682a90856fea9eb0669b7b9
https://doi.org/10.1116/1.1825014
https://doi.org/10.1116/1.1825014
Publikováno v:
Journal of the American Chemical Society. 108:6651-6661
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb1e2648b4261eb4159441185b64c5b0
https://doi.org/10.1021/ja00281a034
https://doi.org/10.1021/ja00281a034
Autor:
Leslie E. Carpenter, Wei Lee, Leonard V. Interrante, M. F. Garbauskas, Christopher K. Whitmarsh, Glen A. Slack
Publikováno v:
MRS Proceedings. 73
The reaction of trialkylaluminum compounds with ammonia has been examined as a potential route to high purity AlN powder and to AlN thin films. This reaction proceeds in stages in which the initially formed Lewis acid/base adduct undergoes thermal de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52f46d28e8f4abfc34c9c583b822ae6c
https://doi.org/10.1557/proc-73-359
https://doi.org/10.1557/proc-73-359
Conference
Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.
K zobrazení výsledku je třeba se přihlásit.