Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Leslie E. Carpenter"'
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 22:3497
While the primary use of hydrogen silsesquioxane (HSQ) is as a dielectric in microelectronics fabrication, this material is also capable of forming high resolution, negative-tone features with low roughness when patterned with an electron beam. Unfor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ccccde06682a90856fea9eb0669b7b9
https://doi.org/10.1116/1.1825014
https://doi.org/10.1116/1.1825014
Publikováno v:
Journal of the American Chemical Society. 108:6651-6661
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb1e2648b4261eb4159441185b64c5b0
https://doi.org/10.1021/ja00281a034
https://doi.org/10.1021/ja00281a034
Autor:
Leslie E. Carpenter, Wei Lee, Leonard V. Interrante, M. F. Garbauskas, Christopher K. Whitmarsh, Glen A. Slack
Publikováno v:
MRS Proceedings. 73
The reaction of trialkylaluminum compounds with ammonia has been examined as a potential route to high purity AlN powder and to AlN thin films. This reaction proceeds in stages in which the initially formed Lewis acid/base adduct undergoes thermal de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52f46d28e8f4abfc34c9c583b822ae6c
https://doi.org/10.1557/proc-73-359
https://doi.org/10.1557/proc-73-359
Conference
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Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2004, Vol. 22 Issue 6, p3497-3502, 6p
Autor:
Interrante, Leonard V., Carpenter, Leslie E., Whitmarsh, Christopher, Lee, Wei, Garbauskas, Mary, Slack, Glen A.
Publikováno v:
MRS Online Proceedings Library; 01/07/1986, Vol. 73, pN.PAG-1, 1p