Zobrazeno 1 - 10
of 34
pro vyhledávání: '"Lercel, Michael J."'
Autor:
Gordon, Ronald L., Brunner, Timothy A., Seong, Nakgeuon, Lercel, Michael J., Gallatin, Gregg M.
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p1499-1509, 11p
Autor:
Robinson, Chris, Seong, Nakgeuon, Kimmel, Kurt, Brunner, Timothy A., Hibbs, Michael, Lercel, Michael J., McCafferty, Diane, Sewell, Harry, O'Neil, Timothy K., Ivaldi, Juan, Andresen, Keith
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p1669-1678, 10p
Autor:
Wood II, Obert R., Reu, Phillip L., Engelstad, Roxann L., Lovell, Edward G., Lercel, Michael J., Thiel, Carey W., Lawliss, Mark S., Mackay, R. S.
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p521-530, 10p
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p480-485, 6p
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p68-78, 11p
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p883-892, 10p
Autor:
Reu, Phillip L., Chen, Cheng-Fu, Engelstad, Roxann L., Lovell, Edward G., Lercel, Michael J., Wood II, Obert R., Mackay, R. S.
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p547-558, 12p
Status of fabrication of square-format masks for extreme-ultraviolet lithography (EUVL) at the MCoC.
Autor:
Racette, Kenneth C., Williams, Carey T., Fisch, Emily, Kindt, Louis, Lawliss, Mark, Ackel, Robin, Lercel, Michael J.
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p161-172, 12p
Autor:
Lercel, Michael J., Williams, Carey T., Lawliss, Mark, Ackel, Robin, Kindt, Louis, Fisch, Emily
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p790-798, 9p