Effects of thermal annealing on the microstructure and mechanical properties of carbon-nitrogen films deposited by radio frequency-magnetron sputtering.

Autor: Lacerda, M. M., Freire, F. L., Prioli, R., Lepinski, C. M., Mariotto, G.

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1999, Vol. 17 Issue 5, p2811-2818, 8p