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pro vyhledávání: '"Leonid Gorkhover"'
Autor:
Gennady Fedosenko, Alexander Laue, Leonid Gorkhover, Hin Yiu Anthony Chung, Valerie Derpmann, Michel Aliman, Martin Antoni, Rüdiger Reuter
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In this work, we introduce a new, very fast and extremely sensitive inline process mass spectrometry technique based on Fourier-Transform 3D-Quadrupole Ion Trap technology. With this new technology, we have successfully detected sub-ppbV AsH3 and sin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c51bdca65d6f3781f41218b42b9cb0a9
https://doi.org/10.1109/asmc.2016.7491140
https://doi.org/10.1109/asmc.2016.7491140
