Zobrazeno 1 - 10
of 39
pro vyhledávání: '"Lena Nicolaides"'
Publikováno v:
The European Physical Journal Special Topics. 153:287-290
Non-contact, non-intrusive Photo-Carrier Radiometry (PCR) was used for monitoring nano-depth junctions in industrial-grade silicon wafers. The silicon wafers were implanted with arsenic to the dose of 5E10 14 cm -2 . The junction depth was in the 30
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37bffb8c67c56567cb39036a1172e512
https://doi.org/10.1140/epjst/e2008-00447-y
https://doi.org/10.1140/epjst/e2008-00447-y
Publikováno v:
Review of Scientific Instruments. 75:2144-2148
Thermal wave (TW) studies of ultra-shallow junctions (USJ) formed by ion implantation into a semiconductor wafer followed by rapid thermal annealing (RTP) are described. It is shown that using the TW technique allows for a simultaneous determination
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dee2170a9adc4b89a643e5ce79c26be0
https://doi.org/10.1063/1.1755445
https://doi.org/10.1063/1.1755445
Autor:
Lena Nicolaides, Andreas Mandelis
Publikováno v:
Journal of Applied Physics. 90:1255-1265
Two approaches for eliminating surface roughness in the thermal-wave frequency response of inhomogeneous solids are developed. The first approach is based on the theoretical formulation of roughness as an effective homogeneous overlayer and is adequa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::152a6b90f4cda9e9a7a257157a3683a7
https://doi.org/10.1063/1.1383579
https://doi.org/10.1063/1.1383579
Publikováno v:
Circuits Systems and Signal Processing. 19:339-363
Photothermal depth profilometry is formulated as a nonlinear inverse scattering problem. Starting with the one-dimensional heat diffusion equation, we derive a mathematical model relating arbitrary variation in the depth-dependent thermal conductivit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6138f0992b444ce89fae63a48b3b59f
https://doi.org/10.1007/bf01200892
https://doi.org/10.1007/bf01200892
Publikováno v:
Review of Scientific Instruments. 71:2440-2444
A new signal generation methodology based on lock-in amplifier common mode rejection demodulation for materials nondestructive evaluation has been implemented experimentally with thermal waves in a photothermal radiometric apparatus. A procedure to c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d22c83bc9bfe2b3328c2daf089f790f1
https://doi.org/10.1063/1.1150633
https://doi.org/10.1063/1.1150633
Publikováno v:
Review of Scientific Instruments. 71:2445-2451
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::236d06aa49dcf637ff2970f7c1de4ec2
https://doi.org/10.1063/1.1150634
https://doi.org/10.1063/1.1150634
Publikováno v:
NDT & E International. 32:437-443
Laser Infrared Photothermal Radiometry has been utilized for several thermal-wave inverse-problem NDE applications. These include depth profilometry of steels and rails and scanning tomography of sub-surface defects in steels. Further, a computationa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b4e60051e7862219056771845e41834c
https://doi.org/10.1016/s0963-8695(99)00021-3
https://doi.org/10.1016/s0963-8695(99)00021-3
Autor:
Andreas Mandelis, Lena Nicolaides
Publikováno v:
Inverse Problems. 13:1393-1412
Thermal-wave slice diffraction tomography (TSDT) is a photothermal imaging technique for non-destructive evaluation (NDE), leading to the detection of subsurface cross sectional defects in opaque solids in the very-near-surface region ( - mm). An exa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1b0ec27a1eddd85809a681ba96ad8302
https://doi.org/10.1088/0266-5611/13/5/018
https://doi.org/10.1088/0266-5611/13/5/018
Publikováno v:
Inverse Problems. 13:1413-1425
Laser infrared photothermal radiometry is developed into a thermal-wave slice diffraction tomography (TSDT) instrumentation and measurement methodology for cross sectional imaging of subsurface defects. A mild-steel sample with artificial subsurface
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ddaf55669e1b2045fc1457d8d823bbd2
https://doi.org/10.1088/0266-5611/13/5/019
https://doi.org/10.1088/0266-5611/13/5/019
Publikováno v:
Review of Scientific Instruments. 74:563-565
A combination of the thermal wave and optical technologies was found to be advantageous in characterization of implants for ultrashallow junctions. Two sets of Si wafers implanted with boron and arsenic ions at low energies (0.5–5.0 keV) and high d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7a073f423c3862ae86d4e93f758fa787
https://doi.org/10.1063/1.1515889
https://doi.org/10.1063/1.1515889