Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Lena Mohr"'
Publikováno v:
Industrial & Engineering Chemistry Research. 59:17680-17688
In microelectromechanical system manufacturing and especially in the photovoltaic industry, wet-chemical baths are used for surface structuring, conditioning, and cleaning. Ozone-based wet-chemical cleaning processes show, in addition to the cleaning
Simulating the fluid flow during a wet chemical process bath, allows for a deeper understanding of the flow conditions in the reaction basin. To validate the simulation, dye visualization as well as laser doppler velocimetry (LDV) and particle image
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cf119e885d8bab15504e893635cb2f75
https://publica.fraunhofer.de/handle/publica/258937
https://publica.fraunhofer.de/handle/publica/258937
Autor:
Lena Mohr, Martin Zimmer
Publikováno v:
AIP Conference Proceedings.