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pro vyhledávání: '"Lefèvreand , G."'
Autor:
Vallee, C., Bonvalot, M., Gonon, P., Bsiesy, A., Pelissier, B., Chevolleau, T., Yeghoyan, T., Jaffal, M., Belahcen, S., Vallat, R., Chacker, A., Pisi, Y., Zakhtser, A., Pesce, V., Lefèvreand , G., Salicio, O., Gassilloud, R., Possémé, N.
Publikováno v:
73rd Gaseous Electronics Conference GEC 2020
73rd Gaseous Electronics Conference GEC 2020, 2020, virtuelle, United States
73rd Gaseous Electronics Conference GEC 2020, 2020, virtuelle, United States
International audience; The scaling of transistor is still on the road only thanks to the introduction of complex multiple patterning steps that are more and more expensive and time consuming. Therefore, microelectronic industry needs new solutions a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::980b8cf64df8dfb673acfc38c33abcb6
https://hal.univ-grenoble-alpes.fr/hal-03449640
https://hal.univ-grenoble-alpes.fr/hal-03449640
