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Publikováno v:
MRS Proceedings. 163
Beryllium is an effective p-dopant in GaAs and AlGaAs and plays an important role in device characterizations of hetero bipolar transistors. This work addresses the doping and mobility properties for two series of beryllium-doped samples: GaAs and Al
Autor:
M. G. Spencer, Leary O. A. Myers
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 4:1259