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Autor:
Goh, Wang-Ling *, Yeo, Kiat-Seng, Lazuardi, Stephen, Peng, Wei, Leong, Kam-Chew, Chan, Lap, See, Alex
Publikováno v:
In Microelectronics Journal September 2001 32(9):725-731
Autor:
Lazuardi, Stephen
This project emphasizes more on the transistor electrical characterization aspect as the input Front End of Line parameters are varied. This report covers the characterization of a fully working 0.13 um device with three layer metal copper Dual Damas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______1392::a90314f8dcaeef4f6ae92b3c6547e75f
http://hdl.handle.net/10356/4564
http://hdl.handle.net/10356/4564
