Electrostatic Force for Self-alignment of Microparts and its Dependence on Geometrical and Electrical Parameters

Autor: Lazarou Panagiotis, Aspragathos Nikolaos, Kritikou Georgia

Publikováno v: Proceedings of the 4M/ICOMM2015 Conference.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6c8689ea421dfbbfd070145b69e41351
https://doi.org/10.3850/978-981-09-4609-8_129

Packaging of bio-MEMS: strategies, technologies and applications

Autor: Thomas Velten, Ruf, Hansheinrich, Barrow, David, Aspragathos, Nikos, Lazarou, Panagiotis, Jung, Erik, Khan Malek, Chantal, Richter, Martin, Kruckow, Jürgen

Publikováno v: BASE-Bielefeld Academic Search Engine
IEEE Transactions on Advanced Packaging
IEEE Transactions on Advanced Packaging, Institute of Electrical and Electronics Engineers, 2005, 28(4), pp.533-546
Thomas Velten

International audience; Biomicroelectromechanical systems (bio-MEMS) are MEMS which are designed for medical or biological applications. As with other MEMS, bio-MEMS frequently, have to be packaged to provide an interface to the macroscale world of t

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::866ebf5edd12592fa9709b57bf7d6102
https://hal.archives-ouvertes.fr/hal-00108304