Zobrazeno 1 - 10
of 24
pro vyhledávání: '"Layton C. Hale"'
Autor:
Layton C. Hale
Publikováno v:
Precision Engineering. 64:200-209
A 3-V kinematic coupling with adjustable vee angles, ranging from 25° to 80° inclination from the base plane, was designed and built to test the limiting coefficient of friction (CoF), which is a measure of the coupling's ability to reach center wh
Publikováno v:
Precision Engineering. 29:1-10
Precision spindles used for diamond turning and other applications requiring low error motion generally require a drive system that ideally applies a pure torque to the rotating spindle. Frequently a frameless motor, that is, one without its own bear
Autor:
Karen L. Jefferson, William C. Replogle, David Attwood, Donald W. Sweeney, Layton C. Hale, Donna J. O'Connell, Leonard E. Klebanoff, Alvin H. Leung, John B. Wronosky, Henry N. Chapman, Daniel A. Tichenor, Patrick P. Naulleau, Sang H. Lee, Glenn D. Kubiak, Kenneth A. Goldberg, James A. Folta, John S. Taylor, W. P. Ballard, Richard H. Stulen, John E. M. Goldsmith
Publikováno v:
Journal of Photopolymer Science and Technology. 15:351-360
The EUV Engineering Test Stand (ETS) has demonstrated the printing of static and scanned 100nm dense features. This milestone was first achieved in 2001 with a developmental set of projection optics (P0 Box 1) and with a low power LPP source (40W dri
Autor:
Layton C. Hale, Alexander H. Slocum
Publikováno v:
Precision Engineering. 25:114-127
Kinematic couplings are well known to the precision engineering community as simple devices that provide rigid, repeatable connection between two objects through usually six local contact areas. They serve many applications that require 1) separation
Autor:
Mark A. McCord, Upendra Ummethala, Thomas Gubiotti, Jeff Sun, Jason Yang, Anthony Cheung, Paul Petric, Allen Carroll, Christopher F. Bevis, John J. Hench, Regina Freed, Shinichi Kojima, Walter D. Mieher, Layton C. Hale
Publikováno v:
SPIE Proceedings.
Maskless electron beam lithography has the potential to extend semiconductor manufacturing to the sub-10 nm technology node. KLA-Tencor is currently developing Reflective Electron Beam Lithography (REBL) for high-volume 10 nm logic (16 nm HP). This p
Autor:
Shy-Jay Lin, Jeff Sun, Walter D. Mieher, Christopher F. Bevis, Upendra Ummethala, Thomas Gubiotti, Francoise Kidwingira, Layton C. Hale, Regina Freed, Shinichi Kojima, John J. Hench, Wen-Chuan Wang, Jason Yang
Publikováno v:
Alternative Lithographic Technologies IV.
Maskless electron beam lithography can potentially extend semiconductor manufacturing to the 16 nm technology node and beyond. KLA-Tencor is developing Reflective Electron Beam Lithography (REBL) targeting high-volume 16 nm half pitch (HP) production
Autor:
Alexander H. Slocum, Layton C. Hale
Publikováno v:
Precision Engineering. 16:244-258
Position control system typical of machine tools and robots usually operate at relatively high torque and low speed. Although servo motors having these characteristics are now available, their cost, size, and weight generally exceed those of the trad
Autor:
Carsten P. Jensen, William W. Craig, Layton C. Hale, Kaya Mori, Michael J. Pivovaroff, Kenneth L. Blaedel, Todd A. Decker, Finn Erland Christensen, William W. Zhang, Fiona A. Harrison, Gordon Tajiri, Charles J. Hailey, Jason E. Koglin, Nicolai Brejnholt, Kristin K. Madsen, Hongjun An
The Nuclear Spectroscopic Telescope Array (NuSTAR) is a NASA satellite mission scheduled for launch in 2011. Using focusing optics with multilayer coating for enhanced reflectivity of hard X-rays (6-79 keV), NuSTAR will provide a combination of clari
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b4b34f4c70566112481389109f2f1adf
https://resolver.caltech.edu/CaltechAUTHORS:20161129-073058299
https://resolver.caltech.edu/CaltechAUTHORS:20161129-073058299
Publikováno v:
SPIE Proceedings.
LLNL has successfully fabricated small (1.5 cm{sup 2} area) germanium immersion gratings. We studied the feasibility of producing a large germanium immersion grating by means of single point diamond flycutting. Our baseline design is a 63.4o blaze ec