Zobrazeno 1 - 10
of 24
pro vyhledávání: '"Lawrence J. Pilione"'
Autor:
Anthony H. McDaniel, Paul Sunal, J. RaviPrakash, F.K. Schweighardt, Russell Messier, R.T. McGrath, Lawrence J. Pilione, Mark W. Horn
Publikováno v:
Sensors and Actuators B: Chemical. 120:439-446
The effect of thin film morphology, carbon monoxide (CO) and resistor geometry on the response of hydrogen sensitive thin film palladium resistors has been investigated. Films with two different morphologies were fabricated by DC magnetron sputtering
Autor:
Qi He, Lawrence J. Pilione, Russell Messier, Bill Drawl, Fanxiu Lu, Craig Frankel, Chengming Li
Publikováno v:
Thin Solid Films. 474:96-102
By controlling the pretreatment processes and deposition parameters on silicon substrates, diamond thin films with different surface roughness and sp 2 /sp 3 ratio were used as an interlayer for subsequent c-BN (cubic boron nitride) thin film deposit
Improvement of Adhesion of Cubic Boron Nitride Films: Effect of Interlayer and Deposition Parameters
Publikováno v:
Materials Science Forum. :3635-3640
Diamond and B4C coatings were used as an interlayer for the growth of cubic boron nitride thin films on c-silicon. By employing a B-C-N gradient layer on top of the B4C interlayer, improved adhesion occured between BN and B4C. A multi-step process af
Autor:
Lawrence J. Pilione, J. J. Santiago, Wilfredo Otaño-Rivera, George P. Lamaze, Russell Messier
Publikováno v:
Diamond and Related Materials. 13:1690-1696
Cubic boron nitride thin films were prepared by sputtering a hexagonal BN target with an unbalanced magnetron using pulsed d.c. biasing of the crystalline silicon substrate. An additional balanced magnetron was used to co-sputter aluminum in order to
Publikováno v:
Journal of Wide Bandgap Materials. 9:191-206
Autor:
Russell Messier, Lawrence J. Pilione, Alejandro B. Rodríguez-Navarro, W. Otaño-Rivera, Juan Manuel García-Ruiz
Publikováno v:
Journal of Materials Research. 12:1850-1855
The development of preferred orientation in AlN thin films deposited on silica glass substrates by rf sputtering at low substrate temperature (c-axis perpendicular to the substrate surface. At higher pressure (>15 mTorr), a spreading in the incidence
Autor:
Alejandro B. Rodríguez-Navarro, W. Otaño-Rivera, Juan Manuel García-Ruiz, Lawrence J. Pilione, Russell Messier
Publikováno v:
Journal of Materials Research. 12:1689-1692
A new method to prepare polycrystalline AlN thin films biaxially oriented on amorphous substrates has been demonstrated. The films were deposited at different angles of incidence with a rf sputtering system. Population-1 crystallites, oriented with t
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 12:1569-1575
Boron nitride thin films were deposited by ion‐assisted evaporation and characterized by neutron depth profiling (NDP), a nondestructive method for the compositional analysis of solids. The phases present in the films were determined by infrared sp
Autor:
L. B. Hackenberger, Russell Messier, Lawrence J. Pilione, George P. Lamaze, Robert G. Downing
Publikováno v:
Diamond and Related Materials. 3:728-731
Cubic boron nitride (c-BN) thin films are of interest in such diverse areas as semiconducting devices, wear resistant coatings, and low friction coatings, owing to the exceptional electrical and mechanical properties of that material. In this work, t
Publikováno v:
Journal of Materials Research. 5:2345-2350
Diamond films of 15–20 μm thicknesses were prepared by microwave plasma enhanced chemical vapor deposition onto crystalline silicon substrates. The growth surfaces of the films were rough with polycrystalline crystallographic habits, while the sub