Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Lawrence Ferreira"'
Publikováno v:
Journal of Photopolymer Science and Technology. 13:513-518
Polymers based on tertiary-butyl acrylate were synthesized with different compositions and glass transition temperature (Tg) values. These polymers are formulated identically and exposed under identical optical conditions. Lithographically, these pol
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::33f63adc87036fc4e66297651ca93f5c
https://doi.org/10.2494/photopolymer.13.513
https://doi.org/10.2494/photopolymer.13.513
Autor:
Lawrence Ferreira, Toru Fujimori, Allyn Whewell, Veerle Van Driessche, Brian Maxwell, Kazuya Uenishi, Thomas R. Sarubbi, Yasumasa Kawabe, Toshiaki Aoai, Tadayoshi Kokubo, Andrew J. Blakeney, Murrae J. Bowden, Shiro Tan, Sanjay Malik
Publikováno v:
Journal of Photopolymer Science and Technology. 12:591-600
Physical and lithographic properties of structurally diverse acetal-derivatized hydroxy styrene polymers are reported. The dissolution and thermal properties of the acetal-blocked-polymers vary with the size of the pendent acetal moiety. The lithogra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ed89aa9bd6cb9b41e7a0844fb651a16
https://doi.org/10.2494/photopolymer.12.591
https://doi.org/10.2494/photopolymer.12.591
Autor:
Thomas R. Sarubbi, Brian Maxwell, Joseph J. Sizensky, B. A. Blachowicz, Thomas Kocab, Sanjay Malik, Lawrence Ferreira, Murrae J. Bowden, Andrew J. Blakeney
Publikováno v:
Journal of Photopolymer Science and Technology. 11:431-438
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0de803debf44cdfaf7e23d3d687a0935
https://doi.org/10.2494/photopolymer.11.431
https://doi.org/10.2494/photopolymer.11.431
Autor:
Thomas R. Sarubbi, Shiro Tan, Sanjay Malik, Brian Maxwell, Yasumasa Kawabe, Andrew J. Blakeney, Toru Fujimori, Lawrence Ferreira, Kazuya Uenishi, Tadayoshi Kokubo, Murrae J. Bowden, Allyn Whewell, Veerle Van Driessche, Toshiaki Aoai
Publikováno v:
SPIE Proceedings.
Lithographic properties of a variety of acetal-derivatized styrene based polymers are reported. The structural modifications in the polymers involve varying the size of the pendent acetal moiety. the lithographic performances of the resists containin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::659ac43948df58fe4b07f51e34aa7bc9
https://doi.org/10.1117/12.350222
https://doi.org/10.1117/12.350222
Publikováno v:
SPIE Proceedings.
Chemically amplified (CA) resist systems are known to be sensitive to contamination. Environmental contaminants such as airborne amines can result in T-topping. In addition, the undesired diffusion of photogenerated acid into unexposed areas can resu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b40892624680ddf1497dae0382d71fe
https://doi.org/10.1117/12.312413
https://doi.org/10.1117/12.312413
Publikováno v:
SPIE Proceedings.
A new class of novolaks capable of self associating has been synthesized. The associating structures are resulted via extended network of hydrogen bonding. Softening temperatures of the associating novolaks are found to be 15 - 25 degree(s)C higher t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f72b44a613231414c540763e0fbf5295
https://doi.org/10.1117/12.312478
https://doi.org/10.1117/12.312478
Autor:
Yasumasa Kawabe, Tadayoshi Kokubo, Lawrence Ferreira, Fumiyuki Nishiyama, Shinji Sakaguchi, Andrew J. Blakeney, Shiro Tan
Publikováno v:
SPIE Proceedings.
Effects of a dissolution promoter (DP) on the lithographic behavior of DNQ-novolac resists were investigated. The key structure/property relationships of the DP in relation to other parameters of the resist components were identified. In this work, w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2c484b193cd7a4be99c01da04ee8d79b
https://doi.org/10.1117/12.241841
https://doi.org/10.1117/12.241841
Autor:
M. Fregeolle, Joseph J. Sizensky, Arturo N. Medina, Lawrence Ferreira, Medhat A. Toukhy, Sobhy Tadros, Andrew J. Blakeney
Publikováno v:
SPIE Proceedings.
A new class of diazonaphthoquinone (DNQ) photoactive compounds (PACs) based on the divanillin core is introduced in this paper. The general structure of these PAC backbones is shown in Formula 1. The divanillin structure possesses unique electronic c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b41d3ec604e94023d6acec440a94c38b
https://doi.org/10.1117/12.241843
https://doi.org/10.1117/12.241843
Autor:
Lawrence Ferreira, Medhat A. Toukhy, Patricia Morra, Andrew J. Blakeney, Nicholas M. Reynolds
Publikováno v:
SPIE Proceedings.
Recent advances in computer hardware and software have provided the capability to simulate complex mixtures of compounds on a molecular level. These tools provide the potential for exploration of resist chemistry and mechanism on a molecular level wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::693793672b1b9a0a017f96e05984867f
https://doi.org/10.1117/12.210388
https://doi.org/10.1117/12.210388
Publikováno v:
SPIE Proceedings.
Recent advances in computer hardware and software have provided the capability to simulate complex mixtures of compounds on a molecular level. These tools provide the potential for exploration of resist chemistry and mechanism on a molecular level wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f4678936d56cfff6fdc80af051a6c4d
https://doi.org/10.1117/12.210387
https://doi.org/10.1117/12.210387