Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Lawerence S. Melvin"'
Publikováno v:
SPIE Proceedings.
In the year of 1873, Professor E. Abbe, cooperating with Carl Zeiss Inc, summarized his discovery of the microscope imaging principle which states that the final image is the superposition result of all the diffracted images entering at different ang
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a66f948ff54dea8205a12233e0cc7ed7
https://doi.org/10.1117/12.814419
https://doi.org/10.1117/12.814419
Autor:
Kevin Lucas, Yongfa Fan, Ebo Croffie, Lawerence S. Melvin, Jianliang Li, Qiaolin Zhang, Brad Falch
Publikováno v:
SPIE Proceedings.
As the semiconductor industry moves to the 45nm node and beyond, the tolerable lithography process window significantly shrinks due to the combined use of high NA and low k1 factor. This is exacerbated by the fact that the usable depth of focus at 45
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2e7b9dc5c2d659c3c2169b5807422237
https://doi.org/10.1117/12.815094
https://doi.org/10.1117/12.815094